By Noboru Kimizuka,Shunpei Yamazaki
Electronic units in response to oxide semiconductors are the focal point of a lot recognition, with crystalline fabrics producing large advertisement luck. Indium–gallium–zinc oxide (IGZO) transistors have a better mobility than amorphous silicon transistors, and an exceptionally low off-state present. C-axis aligned crystalline (CAAC) IGZO allows competitive down-scaling, excessive reliability, and strategy simplification of transistors in screens and LSI units. This unique booklet introduces the CAAC-IGZO constitution, and describes the physics and expertise of this new type of oxide fabrics. It explains the crystallographic class and features of crystalline oxide
semiconductors, their crystallographic features and actual homes, and the way this distinct fabric has made an immense contribution to the sphere of oxide semiconductor skinny movies. extra books during this sequence describe applications of CAAC-IGZO in flat-panel screens and LSI devices.
- Introduces the original and innovative, but fairly unknown crystalline oxide semiconductor CAAC-IGZO
- Presents crystallographic overviews of IGZO and comparable compounds.
- Offers an in-depth knowing of CAAC-IGZO.
- Explains the fabrication approach to CAAC-IGZO skinny films.
- Presents the actual houses and most modern information to help high-reliability crystalline IGZO in keeping with hands-on experience.
- Describes the producing strategy the CAAC-IGZO transistors and introduces
the gadget program utilizing CAAC-IGZO.
Read Online or Download Physics and Technology of Crystalline Oxide Semiconductor CAAC-IGZO: Fundamentals (Wiley Series in Display Technology) PDF
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