By Karen A. Reinhardt,Richard F. Reidy

This accomplished quantity presents an in-depth dialogue of the basics of cleansing and floor conditioning of semiconductor purposes resembling high-k/metal gate cleansing, copper/low-k cleansing, excessive dose implant stripping, and silicon and SiGe passivation. the speculation and basic physics linked to rainy etching and rainy cleansing is reviewed, plus the outside and colloidal features of rainy processing. formula improvement practices and method are offered besides the functions for fighting copper corrosion, cleansing aluminum traces, and different delicate layers. this can be a must-have reference for any engineer or supervisor linked to utilizing or offering cleansing and infection loose applied sciences for semiconductor production.

From the Reviews...

"This instruction manual should be a helpful source for plenty of educational libraries. Many engineering librarians who paintings with a number of courses (including, yet now not constrained to fabrics Engineering) may still comprise this paintings of their assortment. My suggestion is so as to add this paintings to any assortment that serves a campus with a materials/manufacturing/electrical/computer engineering courses and campuses with departments of physics and/or chemistry with huge graduate-level enrollment."
Randy Wallace, division Head, Discovery Park Library, college of North Texas

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