By Emmanuel Defaÿ

This ebook describes up to date expertise utilized to high-K fabrics for greater than Moore functions, i.e. microsystems utilized to microelectronics middle technologies.
After detailing the fundamental thermodynamic idea utilized to high-K dielectrics skinny motion pictures together with extrinsic results, this ebook emphasizes the specificity of skinny movies. Deposition and patterning applied sciences are then offered. an entire bankruptcy is devoted to the most important function performed within the box via X-Ray Diffraction characterization, and different characterization thoughts also are defined resembling Radio frequency characterization. An in-depth research of the effect of leakage currents is played including reliability dialogue. 3 applicative chapters disguise built-in capacitors, variables capacitors and ferroelectric stories. the ultimate bankruptcy offers with a pretty new study box, multiferroic skinny films.

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